JPH0288233U - - Google Patents
Info
- Publication number
- JPH0288233U JPH0288233U JP16739488U JP16739488U JPH0288233U JP H0288233 U JPH0288233 U JP H0288233U JP 16739488 U JP16739488 U JP 16739488U JP 16739488 U JP16739488 U JP 16739488U JP H0288233 U JPH0288233 U JP H0288233U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- sub
- main
- susceptors
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16739488U JPH0521871Y2 (en]) | 1988-12-23 | 1988-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16739488U JPH0521871Y2 (en]) | 1988-12-23 | 1988-12-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0288233U true JPH0288233U (en]) | 1990-07-12 |
| JPH0521871Y2 JPH0521871Y2 (en]) | 1993-06-04 |
Family
ID=31455648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16739488U Expired - Lifetime JPH0521871Y2 (en]) | 1988-12-23 | 1988-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521871Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006013808A1 (ja) * | 2004-08-06 | 2006-02-09 | Hitachi Kokusai Electric Inc. | 熱処理装置及び基板の製造方法 |
-
1988
- 1988-12-23 JP JP16739488U patent/JPH0521871Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006013808A1 (ja) * | 2004-08-06 | 2006-02-09 | Hitachi Kokusai Electric Inc. | 熱処理装置及び基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521871Y2 (en]) | 1993-06-04 |